Anchor Semiconductor is the distributor in China for KLA-Tencor's Computational Lithography family products.

Computational Lithography
Advanced lithography relies heavily on computational lithography tools to analyze and optimize patterning results.

• PROLITH™: Lithography simulation tool designed for R&D scientists and engineers
• ProDATA: Critical-dimension (CD) analysis tool
• LithoWare: Linux-based lithography optimization tool for EDA users (OPC and RET engineers)
• ProBEAM: 3-D electron beam lithography simulator

For introduction of each product, please visit website:

http://www.kla-tencor.com/current-software-solutions/computational-lithography.html