Die-to-Database Pattern Monitor
High resolution images provide increasingly valuable insight into the nature of yield killing events, so why are fabs wasting them?
SEM Tool - Vendor A
SEM Tool - Vendor B
144,000 High Resolution Images Every Day!
But their potential is wasted…
A picture paints a thousand words, but the rich content of images is reduced to a single class code.
SEM Non-Visual images discarded. It is not unusual for 50% or more of the SEM images to be SNV.
Every 10 days…
Is there a better way?
Introducing…
Die-to-Database Pattern Monitor (D2DB-PM)
Patterning quality and process drift are continuously monitored.
How it works…
Every image is thoroughly analyzed and decomposed into multiple sub-patterns.
Sub-patterns and measurements taken on all instances of the patterns are stored and tracked in a relational database.
Automatic excursion reports are produced, and comprehensive GUI-based analysis use cases are provided.
Some ways of visualizing results…
Summary Table, Pattern Strength and Weakness Box Plot, Contour Gallery, Trend of Selected Patterns.
